Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1997-10-15
1999-12-28
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250287, 250307, H01J 3708, H01J 4900, B01D 5944
Patent
active
06008491&
ABSTRACT:
A method and apparatus for analyzing the surface characteristics of a sample by Secondary Ion Mass Spectroscopy (SIMS) and Mass Spectroscopy of Recoiled Ions (MSRI) is provided. The method includes detecting back scattered primary ions, low energy ejected species, and high energy ejected species by ion beam surface analysis techniques comprising positioning a ToF SIMS/MSRI mass analyzer at a predetermined angle .theta., where .theta. is the angle between the horizontal axis of the mass analyzer and the undeflected primary ion beam line, and applying a specific voltage to the back ring of the analyzer. Preferably, .theta. is less than or equal to about 120.degree. and, more preferably, equal to 74.degree.. For positive ion analysis, the extractor, lens, and front ring of the reflectron are set at negative high voltages (-HV). The back ring of the reflectron is set at greater than about +700V for MSRI measurements and between the range of about +15 V and about +50V for SIMS measurements. The method further comprises inverting the polarity of the potentials applied to the extractor, lens, front ring, and back ring to obtain negative ion SIMS and/or MSRI data.
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Analyzer Combines MSRI and SIMS, R&D Magazine, Sep. 1997, vol. 39, No. 10, p. 25.
Argonne/Ionwerks Corp. Materials Technology is among 1997 R&D Winners, Tech Transfer Highlights, vol. 8, No. 2, 1997.
Surface Analysis of All Elements with Isotopic Resolution at High Ambient Pressures Using Ion Spectroscopic Techniques, V. S. Smentkowski, J.C. Holecek, J.A. Schultz, A.R. Krauss, and D.M. Gruen, submitted for publication in the Proceedings of the 11th International Conference on Secondary Ion Mass Spectroscopy (SIMS), Orlando, Florida, Sep. 7-12, 1997.
Abstract: A Novel Reflectron Time of Flight Analyzer for Surface Analysis using Secondary Ion Mass Spectroscopy and Mass Spectroscopy of Recoiled Ions, by V. S. Smentkowski, A. R. Schultz, D. M. Gruen, J. C. Holecek, and J. A. Schultz, 43rd National Symposium, American Vacuum Society, Philadelphia, Pennsylvania, Oct. 14-18, 1996.
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Abstract: A Time-of-Flight Analyzer for Surface Analysis Using Secondary Ion Mass Spectroscopy and Mass Spectroscopy of Recoiled Ions, V.S. Smentkowski, J.C. Holecek, J.A. Schultz, A.R. Krauss, and D.M. Gruen, Book of Abstracts, Post-ionization Techniques in Surface Analysis (PITSA) 5, Oct. 7 to 11, 1996.
Gruen Dieter M.
Holecek John C.
Krauss Alan R.
Schultz J. Albert
Smentkowski Vincent S.
Anderson Bruce C.
Dvorscak Mark P.
Moser William R.
Park Daniel D.
The United States of America as represented by the United States
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