Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1989-03-03
1991-11-26
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250305, 250287, H01J 37252, H01J 4944
Patent
active
050685350
ABSTRACT:
There is disclosed a time-of-flight ion-scattering spectrometer which comprises an ultra-high vacuum chamber sized to accommodate a flight path of sufficient length to provide unit mass resolution at all detection positions and which has means for detecting both ions and neutral particles at both continuously variable forward scattering and backscattering angles. Spectra of both neutrals plus ions as well as neutrals only can be obtained in the same experiment. The polar incidence angle, surface azimuthal angle, and scattering (or recoil) angle can all be varied continuously and independently of one another. The associated method, Scattering and Recoiling for Electron Distributions and Structure (SREDS), allows one to determine atomic structure of substrate surfaces, the structure of adsorbate sites, and electron distributions above surfaces. Even light adsorbates such as hydrogen, carbon, and oxygen can be quantitated by this method.
REFERENCES:
patent: 4778993 (1988-10-01), Waugh
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Brochure entitled "The 252 Cf Plasma Desorption Mass Spectrometer," distributed by Kratos Analytical, a division of Spectros, Ramsey, New Jersey.
"Californium-252 Plasma Desorption Time of Flight Mass Spectroscopy of Proteins," Sundqvist et al., Biomedical Mass Spectrometry, vol. 11, No. 5, pp. 242-257, (1984).
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"A Versatile Target Manipulator for Use in Ultra-High Vacuum," Bronckers et al., Nuclear Instruments and Methods, vol. 179, pp. 125-130 (1981).
"Surface Structure Analysis of Oxidized Fe(100) by Low Energy Ion Scattering," Van Zoest et al., Surface Science, vol. 182, pp. 179-199 (1987).
Berman Jack I.
University of Houston - University Park
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