Time-of-flight direct recoil ion scattering spectrometer

Details Time-of-flight direct recoil ion scattering spectrometer Time-of-flight direct recoil ion scattering spectrometer

1992-07-02

1994-09-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250287, H01J 37147

Patent

active

053471261

ABSTRACT:
A time of flight direct recoil and ion scattering spectrometer beam line (10). The beam line (10) includes an ion source (12) which injects ions into pulse deflection regions (14) and (16) separated by a drift space (18). A final optics stage includes an ion lens and deflection plate assembly (22). The ion pulse length and pulse interval are determined by computerized adjustment of the timing between the voltage pulses applied to the pulsed deflection regions (14) and (16).

REFERENCES:
patent: 3889115 (1975-06-01), Tamura et al.
patent: 4296323 (1981-10-01), Gerlach
patent: 4785172 (1988-11-01), Kubena et al.
patent: 5068535 (1991-11-01), Rabalais
patent: 5087815 (1992-02-01), Schultz et al.
patent: 5166521 (1992-11-01), Hayashi et al.
patent: 5182453 (1993-01-01), Hayashi

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