Time-of-flight analysis method with continuous scanning and anal

Details Time-of-flight analysis method with continuous scanning and anal Time-of-flight analysis method with continuous scanning and anal

1988-12-09

1991-01-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250287, 250397, H01J 3726

Patent

active

049838318

ABSTRACT:
A time-of-flight method and apparatus of analysis comprising a first step of continuously scanning the surface of a solid sample to be analyzed with a primary particles beam to liberate secondary particles from the sample and to thereby ionize the secondary particles. A second step forms a secondary particles beam and makes it travel through a path which is long enough for secondary particles with different energy levels or different masses to have substantially different times of flight. Then, the secondary particles are discriminated by deflecting them at an angle which is variable periodically as a function of time, with the same period as that of the scanning by the primary particles beam, but with a fixed phase shift such that the secondary particles have a given time of flight and are deflected in a pre-determined direction, irrespective of the point on the sample from which these secondary particles have been liberated. Then the secondary particles that are moving in the pre-determined direction are selected and detected.

REFERENCES:
patent: 3517191 (1970-06-01), Liebl
patent: 3628009 (1971-12-01), Ome et al.
patent: 3845305 (1974-10-01), Liebl
patent: 4107527 (1978-08-01), Cherepin et al.
patent: 4778993 (1988-10-01), Waugh
Nuclear Instruments & Methods in Physics Research, vol. B18, Nos. 4-6, Feb. 1987, pp. 446-451, Elsevier Science Publish, Sensitive, Low Damage Surface Analysis Using Resonance Ionization of Sputtered Atoms, M. J. Pellin, et al.
Nuclear Instruments & Methods in Physics Research, vol. 187, No. 1, Aug. 1981, pp. 143-151, North-Holland Publishing Company, Beam Optics in Secondary Ion Mass Spectrometry H. Liebl.

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