Three dimensional microstructures and method of making

Details Three dimensional microstructures and method of making Three dimensional microstructures and method of making

2005-03-01

2005-03-01

Huff, Mark F. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S313000, C430S315000, C430S322000, C430S324000

Reexamination Certificate

active

06861205

ABSTRACT:
A method of forming complex three-dimensional microstructures wherein an external stimulus is applied to a first layer of a photosensitive material, thereby creating voids in the first layer, and any material present in those voids is removed. A sacrificial material is then provided within at least a portion of the voids. This sacrificial layer fills the voids, either in whole or in part, and enables a second layer of photosensitive material to be stacked upon the first, while still preserving the pattern formed in the first layer. Once the sacrificial layer has been applied, a second layer of photosensitive material may then be stacked onto the first. Successive layers of photosensitive material and sacrificial material may be added until a final, complex three-dimensional structure is created. The sacrificial material may then be removed with a solvent such as carbon dioxide.

REFERENCES:
patent: 4882245 (1989-11-01), Gelmore et al.
patent: 5035939 (1991-07-01), Conlon et al.
patent: 5541408 (1996-07-01), Sittler
patent: 6001428 (1999-12-01), Finter et al.
patent: 6298902 (2001-10-01), DeSimone et al.
patent: 6558475 (2003-05-01), Jur et al.
DeSimone, JM et al., “Synthesis of Fluoropolymers in Supercritical Carbon Dioxide”, p. 945-947. 1992.

Affiliated with

Also associated with

Rating

Three dimensional microstructures and method of making does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Three dimensional microstructures and method of making, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Three dimensional microstructures and method of making will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3371751