Thin specimen producing method and apparatus

Details Thin specimen producing method and apparatus Thin specimen producing method and apparatus

2006-02-21

2006-02-21

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S492210

Reexamination Certificate

active

07002150

ABSTRACT:
A thin specimen producing method acquires a work amount in a 1-line scan by an FIB under a predetermined condition, measures a remaining work width of a thin film on an upper surface of a specimen by a microscopic length-measuring function, determines a required number of scan lines of work to reach a predetermined width by calculation, and executes a work to obtain a set thickness. The work amount in a one-line scan by the FIB under the predetermined condition is determined by working the specimen in scans of plural lines, measuring the etched dimension by the microscopic length-measuring function, and calculating an average work amount per one-line scan.

REFERENCES:
patent: 6664552 (2003-12-01), Shichi et al.

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