Thin film transistor device, method of manufacturing the...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S391000, C257S500000, C257S501000

Reexamination Certificate

active

07038283

ABSTRACT:
In a case of a liquid crystal display apparatus, a gate insulating film of a TFT driven at a low voltage (3.3 V or 5 V) is constituted by one insulating film, and a thickness thereof is set to, for example, 30 nm. This TFT has a structure in which LDD regions (low concentration impurity regions) are not provided. A TFT having a CMOS structure, which is driven at a high voltage (18 V), has a gate insulating film constituted by two insulating films having a thickness of, for example, 130 nm in total. In an n-type TFT, a low concentration impurity region is provided on a drain side. A p-type TFT has a structure having no LDD region. A pixel TFT has a gate insulating film constituted by two insulating films, and LDD regions provided in both of its source/drain.

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patent: 5518940 (1996-05-01), Hodate et al.
patent: 6259120 (2001-07-01), Zhang et al.
patent: 6365917 (2002-04-01), Yamazaki
patent: 2002/0142554 (2002-10-01), Nakajima
patent: 5-142571 (1993-06-01), None
patent: 7-249766 (1995-09-01), None
patent: 8-220505 (1996-08-01), None
patent: 10-27909 (1998-01-01), None
patent: 10-170953 (1998-06-01), None

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