Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2008-09-17
2010-11-09
Nguyen, Ha Tran T (Department: 2829)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S057000, C438S086000
Reexamination Certificate
active
07829356
ABSTRACT:
A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.
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Mei Fang
Su Tzay-Fa
Tanner David
Applied Materials Inc.
Nguyen Ha Tran T
Pathak Shantanu C
Patterson & Sheridan LLP
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