Electric heating – Metal heating – By arc
Reexamination Certificate
2011-01-18
2011-01-18
Elve, M. Alexandra (Department: 3742)
Electric heating
Metal heating
By arc
C219S121750, C219S121780
Reexamination Certificate
active
07872209
ABSTRACT:
The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
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Behrens Vernon
Goldin Alexander
Jennings Dean C.
Mayur Abhilash J.
O'Brien Paul A.
Applied Materials Inc.
Elve M. Alexandra
Townsend and Townsend / and Crew LLP
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