Thermal field emission electron gun

Details Thermal field emission electron gun Thermal field emission electron gun

1990-10-05

1991-10-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250398, H01J 3706

Patent

active

050597922

ABSTRACT:
A thermal field emission electron gun having a Ti/W chip wherein the fore end of the chip is formed to have a radius of curvature of 2000 .ANG. or above, whereby the drift of the FE noise is small and a lithography apparatus of high serviceability ratio is obtained.

REFERENCES:
patent: 4274035 (1981-06-01), Fukuhara et al.
patent: 4430570 (1984-02-01), Takigawa et al.
patent: 4663525 (1987-05-01), Ohtsuki et al.
patent: 4721878 (1988-01-01), Hagiwara et al.
patent: 4994711 (1991-02-01), Matossian

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