Thermal conditioning apparatus

Details Thermal conditioning apparatus Thermal conditioning apparatus

1999-02-12

2000-07-18

Lund, Jeffrie R

Coating apparatus

Gas or vapor deposition

118728, 118729, 118500, 118668, 269 21, 269292, 269903, 20429807, 432117, 432241, 156345, C23C 1600, C23C 1400, F27D 312, C23F 102

Patent

active

060902094

ABSTRACT:
A vapor control apparatus including an endless rim, a stagnation plate and a cover having an exhaust port. The endless rim has a first edge engaging the cover, a second edge opposite the first edge, an interior region and an exterior region defined by the rim and the cover, and a flow passage from the interior region to the exterior region adjacent the cover. The exhaust port is in fluid communication with the interior region and the second edge is seatable on a wafer support. A stagnation plate is disposed in the interior region, defining a stagnant region intermediate the stagnation plate and the surface, and defining at least one flow path in fluid communication with the stagnant region and the interior region.

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