4. Coating apparatus
  5. With means to centrifuge work

Shawn D. Davis

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Methods for exhausting a wafer coating apparatus

Coating processes – Centrifugal force utilized
Patent

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Methods of treating a semiconductor wafer

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Methods of treating a semiconductor wafer

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent

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Rotating gripper wafer flipper

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Rotating gripper wafer flipper

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-463821

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