Thermal arched beam microelectromechanical devices and associate

Details Thermal arched beam microelectromechanical devices and associate Thermal arched beam microelectromechanical devices and associate

1997-09-24

1999-11-30

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Thermal or pyromagnetic

361164, H02K 1500

Patent

active

059948167

ABSTRACT:
A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

REFERENCES:
patent: 1258368 (1918-03-01), Smith
patent: 1658669 (1928-02-01), Cohn et al.
patent: 3213318 (1965-10-01), Glenn
patent: 3609593 (1971-09-01), Bell et al.
patent: 4806815 (1989-02-01), Honna
patent: 5184269 (1993-02-01), Shimada et al.
patent: 5309056 (1994-05-01), Culp
patent: 5355712 (1994-10-01), Petersen et al.
patent: 5441343 (1995-08-01), Pylkki et al.
patent: 5475318 (1995-12-01), Marcus et al.
patent: 5483799 (1996-01-01), Dalto
patent: 5558304 (1996-09-01), Adams
patent: 5600174 (1997-02-01), Reay et al.
patent: 5629665 (1997-05-01), Kaufmann et al.
patent: 5644177 (1997-07-01), Guckel et al.
patent: 5659285 (1997-08-01), Takeda
patent: 5722989 (1998-03-01), Fitch et al.
patent: 5796152 (1998-08-01), Carr et al.
patent: 5813441 (1998-09-01), Dewispelaere
patent: 5862003 (1999-01-01), Saif et al.
Phipps, Thesis: Design And Development Of Microswitches For Micro-Elecro-Mechanical Relay Matrices, Air Force Inst. of Tech., Wright-Patterson AFB, OH School of Engineering, 1995.
Yamagata, et al., A Micro Mobile Mechanism Using Thermal Expansion And Its Theoretical Analysis--A Comparison With Impact Drive Mechanism Using Piezoelectric Elements, Proceedings of the IEEE Micro Electro Mechanical Systems, 1994, pp. 142-147.
Oh, et al., Thin Film Heater On A Thermally Isolated Microstructure, Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, 1992, pp. 277-282.
Safranek, The Properties Of Electrodeposited Metals & Alloys, Amer. Electroplaters & Surface Finishers Society, 1986, pp. 295-315.
Klassen, et al., Silicon Fusion Bonding And Deep Reactive Ion Etching: A New Technology For Microstructures, Transducers '95--Eurosensors IX, The 8th International Conference On Solid State Sensors And Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 556-559.
Noworolski, et al., Fabrication Of SOI Wafers With Buried Cavities Using Silicon Fusion Bonding And Electrochemical Etchback, Transducers '95--Eurosensors IX, The 8th International Conference On Solid State Sensors And Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 71-74.
Single Crystal Silicon Actuators And Sensors Based On Silicon Fusion Bonding Technology, Semi-Annual Progress Report 1, Advanced Research Projects Agency, Lucas NovaSensor, Contract Number DAL 01-94-C-3411, Apr.-Jul. 1994.
Single Crystal Silicon Actuators And Sensors Based On Silicon Fusion Bonding Technology, Semi-Annual Progress Report 2, Advanced Research Projects Agency, Lucas NovaSensor, Contract Number DAL 01-94-C-3411, Jul. 1994-Jan. 1995.
Single Crystal Silicon Actuators And Sensors Based On Silicon Fusion Bonding Technology, Semi-Annual Progress Report, Advanced Research Projects Agency, Lucas NovaSensor, Contract Number DAL 01-94-C-3411, Jan.-Jul. 1995.
Single Crystal Silicon Actuators And Sensors Based On Silicon Fusion Bonding Technology, Semi-Annual Progress Report, Advanced Research Projects Agency, Lucas NovaSensor, Contract Number DAL 01-94-C-3411, Jan.-Aug. 1996.

Affiliated with

Also associated with

Rating

Thermal arched beam microelectromechanical devices and associate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal arched beam microelectromechanical devices and associate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal arched beam microelectromechanical devices and associate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1676626