4. Electrical generator or motor structure
  5. Non-dynamoelectric
  6. Thermal or pyromagnetic

Ramaswamy Mahadevan

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Articulated MEMS electrostatic rotary actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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MEMS device members having portions that contact a substrate...

Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate

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Mems magnetically actuated switches and associated switching...

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate

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MEMS microactuators located in interior regions of frames...

Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate

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MEMS optical cross-connect switch

Optical waveguides – With optical coupler – Switch
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Profile ID: LFUS-PAI-P-182685

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