Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2006-11-07
2010-12-14
Vu, Hung (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C438S018000
Reexamination Certificate
active
07851793
ABSTRACT:
A test structure includes a time dependent dielectric breakdown (TDDB) test pattern formed in a dielectric material on a wafer. The test pattern includes first and second conductive lines formed in the dielectric material. The second conductive line is adjacent to the first conductive line. The first conductive line and the second conductive line are separated by a first minimum distance at a first portion of the TDDB test pattern. The first conductive line and the second conductive line are separated by a second minimum distance at a second portion of the TDDB test pattern. The second minimum distance is greater than the first minimum distance. The second portion is different than the first portion. It also may have a third different portion with a third larger minimum distance between the first and second conductive lines. The TDDB test pattern may have a comb-comb or a comb-serpent structure, for example.
REFERENCES:
patent: 5841164 (1998-11-01), Tsujino et al.
patent: 6022750 (2000-02-01), Akram et al.
patent: 6339229 (2002-01-01), Shiga et al.
patent: 6351135 (2002-02-01), Kim
patent: 6774394 (2004-08-01), Wang
patent: 6781401 (2004-08-01), Kim
patent: 6967499 (2005-11-01), Haase et al.
patent: 7078920 (2006-07-01), Okajima
patent: 7355201 (2008-04-01), Zhu et al.
patent: 2005/0212547 (2005-09-01), Suzuki
Lin Ming-Zong
Wang Chien-Jung
Slater & Matsil L.L.P.
Taiwan Semiconductor Manufacturing Company , Ltd.
Vu Hung
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