Test structure for detecting defect size in a semiconductor...

Details Test structure for detecting defect size in a semiconductor... Test structure for detecting defect size in a semiconductor...

2006-11-07

2006-11-07

Zarneke, David A. (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257SE21531

Reexamination Certificate

active

07132684

ABSTRACT:
A test structure and method for testing a semiconductor device are provided. The test structure including a first test pattern having a plurality of electrically separated metal patterns, a plurality of metal vias formed in opposite end portions of the respective metal patterns, and a second test pattern connected to the first test pattern through the metal vias. By using this structure, the presence, nature, and size of a metal failure can be detected by analyzing a resistance arising from the application of a test voltage to the first test pattern.

REFERENCES:
patent: 4835466 (1989-05-01), Maly et al.
patent: 5051690 (1991-09-01), Maly et al.
patent: 5514974 (1996-05-01), Bouldin
patent: 5663651 (1997-09-01), Hada
patent: 5712571 (1998-01-01), O'Donoghue
patent: 5900735 (1999-05-01), Yamamoto
patent: 6111269 (2000-08-01), Moyal
patent: 6297644 (2001-10-01), Jarvis et al.
patent: 6528818 (2003-03-01), Satya et al.
patent: 6570181 (2003-05-01), Graas et al.
patent: 6603321 (2003-08-01), Filippi et al.
patent: 6787802 (2004-09-01), Yokogawa
patent: 2003/0034558 (2003-02-01), Umemura et al.
patent: 2003/0218168 (2003-11-01), Okajima
patent: 2003/0237064 (2003-12-01), White et al.

Affiliated with

Also associated with

Rating

Test structure for detecting defect size in a semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Test structure for detecting defect size in a semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test structure for detecting defect size in a semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3666664