Test pattern of CMOS image sensor and method of measuring...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure

Reexamination Certificate

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C438S014000, C438S016000, C257S294000, C257SE33076

Reexamination Certificate

active

07807996

ABSTRACT:
The test pattern according to the present invention consists of an opaque metal film pattern formed on a semiconductor substrate, an insulating film formed on the semiconductor substrate and the metal film pattern, a red color filter formed on the insulating film, a planarization layer formed on the insulating film and the red color filter, and a number of micro-lenses formed on the planarization layer.

REFERENCES:
patent: 5450205 (1995-09-01), Sawin et al.
patent: 6664121 (2003-12-01), Grodnensky et al.
patent: 2001/0003446 (2001-06-01), Takafuji
patent: 2004/0241899 (2004-12-01), Brissot et al.
patent: 2005/0274871 (2005-12-01), Li et al.
patent: 2006/0000964 (2006-01-01), Ye et al.
patent: 2006/0138488 (2006-06-01), Kim

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