Test keys structure for a control monitor wafer

Details Test keys structure for a control monitor wafer Test keys structure for a control monitor wafer

2005-08-16

2005-08-16

Le, Dung A. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C438S011000, C438S015000, C438S018000

Reexamination Certificate

active

06930323

ABSTRACT:
A test keys structure comprises a plurality of test keys in scribe lines of a control monitor wafer. Between 50 and 400 test keys are formed on the control monitor wafer, and each of the plurality of test keys has an area of at least 1E6μm2.

REFERENCES:
patent: 4758094 (1988-07-01), Wihl et al.
patent: 5576554 (1996-11-01), Hsu
patent: 5897728 (1999-04-01), Cole et al.
patent: 6027859 (2000-02-01), Dawson et al.
patent: 6248661 (2001-06-01), Chien et al.
patent: 6521910 (2003-02-01), Lin

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