Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1986-07-03
1989-05-09
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
G01N 2101, G01N 2113
Patent
active
048283916
ABSTRACT:
Test-glass changer for measuring layer properties optically in vacuum coating installations. A holding device (10) that accommodates several test glasses (12) is rotatably supported on a substrate holder (4), which serves to transport substrates (5) through a stream (22) of coating material. A control mechanism (16) serves to introduce in each case one test glass (12) into a path of rays (A-A) of a measuring device (7,8) and into the stream (22) of coating material. The control mechanism (16) is an incremental motor, by means of which in each case one test glass (12) can be changed over into a position, stationary relative to the substrate holder (4), in which position it can be passed alternately with the substrates (5) through the path of rays (A-A) of the measuring device (8,8) and through the stream (22) of coating material.
REFERENCES:
patent: 2771055 (1956-11-01), Kelly et al.
patent: 3698946 (1972-10-01), Kaspaul et al.
patent: 4201479 (1980-05-01), Lardon
patent: 4582431 (1986-04-01), Cole
Lehnert Walter
Zultzke Walter
Leybold-Heraeus GmbH
Rosenberger Richard A.
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