Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Reexamination Certificate
2006-07-25
2006-07-25
Gutierrez, Diego (Department: 2859)
Thermal measuring and testing
Temperature measurement
By electrical or magnetic heat sensor
C374S208000, C374S158000, C374S141000
Reexamination Certificate
active
07080941
ABSTRACT:
A temperature sensing system incorporates a contact temperature sensor probe for measuring the temperature of articles. The probe is able to operate effectively even in high radio frequency environments such as those present within radio frequency excited plasma processing chambers. The temperature sensing system includes a contact temperature sensor, such as a thermocouple, surrounded by a shielding sheath of a material such as aluminum which is clad with one or more layers of a cladding material. A tip insulator is provided surrounding the sheath for providing RF insulation and thermal coupling. An RF insulating and thermal insulating mounting member is connected to the tip insulator for mounting the probe on an article to be measured.
REFERENCES:
patent: 2374377 (1945-04-01), Percy
patent: 3147457 (1964-09-01), Gill et al.
patent: 3802926 (1974-04-01), Blencowe
patent: 4724428 (1988-02-01), Brown, Jr.
patent: 4749416 (1988-06-01), Greenspan
patent: 5071258 (1991-12-01), Usher et al.
patent: 5181779 (1993-01-01), Shia et al.
patent: 5449432 (1995-09-01), Hanawa
patent: 5490228 (1996-02-01), Soma et al.
patent: 5520461 (1996-05-01), Curry et al.
patent: 5791782 (1998-08-01), Wooten et al.
patent: 5999081 (1999-12-01), Hannigan et al.
patent: 6063234 (2000-05-01), Chen et al.
patent: 6500299 (2002-12-01), Mett et al.
patent: 6830374 (2004-12-01), Gray
patent: 63300924 (1988-12-01), None
patent: 01288741 (1989-11-01), None
patent: 01299423 (1989-12-01), None
patent: 05164627 (1993-06-01), None
patent: WO 9202794 (1992-02-01), None
Babb Rory
Benjamin Neil
Ross Charles
Buchanan & Ingersoll PC
Gutierrez Diego
Jagan Mirellys
Lam Research Corporation
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