4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Neil Benjamin

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Apparatus and method for controlling the voltage applied to...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Apparatus for controlling the voltage applied to an...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Capacitive manometer having reduced process drift

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Ceramic electrostatic chuck assembly and method of making

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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High flow vacuum chamber including equipment modules such as a p

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-516450

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