Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2004-03-11
2008-07-01
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C414S935000, C414S939000
Reexamination Certificate
active
07394520
ABSTRACT:
A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.
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Franssen Johannes Hendrikus Gertrudis
Hoogkamp Jan Frederik
Klomp Albert Jan Hendrik
Kuipers Leo Wilhelmus Maria
Visser Raimond
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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