4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Johannes Hendrikus Gertrudis Franssen

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Method and apparatus for maintaining a machine part

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Temperature conditioned load lock, lithographic apparatus...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3095746

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