Temperature conditioned load lock, lithographic apparatus...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

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Details

C355S053000, C414S935000, C414S939000

Reexamination Certificate

active

07394520

ABSTRACT:
A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.

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Japanese Office Action issued for Japanese Patent Application No. 2004-067361 dated May 2, 2007.

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