Technique for tuning an ion implanter system

Details Technique for tuning an ion implanter system Technique for tuning an ion implanter system

2008-07-08

2008-07-08

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492220, C250S492200, C438S010000

Reexamination Certificate

active

11123082

ABSTRACT:
A technique for tuning an ion implanter system is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for tuning an ion implanter system having multiple beam-line elements. The method may comprise establishing one or more relationships among the multiple beam-line elements. The method may also comprise adjusting the multiple beam-line elements in a coordinated manner, based at least in part on the one or more established relationships, to produce a desired beam output.

REFERENCES:
patent: 5993050 (1999-11-01), Miura
patent: 6242747 (2001-06-01), Sugitani et al.
patent: 6403972 (2002-06-01), Cucchetti et al.
patent: 6774378 (2004-08-01), Huang et al.
patent: 2003/0042427 (2003-03-01), Sullivan et al.
patent: 2004/0022694 (2004-02-01), Hara et al.
patent: 2004/0102857 (2004-05-01), Markle et al.
patent: 2004/0262532 (2004-12-01), Krueger
patent: 2004/0262533 (2004-12-01), Krueger
patent: 2005/0092939 (2005-05-01), Coss et al.
patent: 2006/0088655 (2006-04-01), Collins et al.
Marvin R. LaFontaine, Paul J. Murphy, Edward Bell and David Holbrook, “Beam Optics of the VIISta 3000 Ion Implanter”.

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