Technique for monitoring and controlling a plasma process

Details Technique for monitoring and controlling a plasma process Technique for monitoring and controlling a plasma process

2007-02-23

2008-11-18

Souw, Bernard E (Department: 2881)

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

C250S286000, C250S42300F, C250S492200, C315S111310, C315S111810

Reexamination Certificate

active

07453059

ABSTRACT:
A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to cause at least a portion of the attracted ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions.

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