4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Plasma

Ludovic Godet

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Ion implantation with heavy halogenide compounds

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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Particle beam assisted modification of thin film materials

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Technique for monitoring and controlling a plasma process

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2248126

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