Technique for manufacturing a solar cell

Details Technique for manufacturing a solar cell Technique for manufacturing a solar cell

2009-10-19

2010-10-19

Geyer, Scott B (Department: 2812)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Reexamination Certificate

active

07816239

ABSTRACT:
Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of filaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane.

REFERENCES:
patent: 4751191 (1988-06-01), Gonsiorawski et al.
patent: 5868952 (1999-02-01), Hatakeyama et al.
patent: 7294779 (2007-11-01), Watabe et al.
patent: 2004/0201806 (2004-10-01), Choo et al.
patent: 2008/0002460 (2008-01-01), Tuckerman et al.
patent: 2008/0099067 (2008-05-01), Ito et al.

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