Technique for implementing a variable aperture lens in an...

Details Technique for implementing a variable aperture lens in an... Technique for implementing a variable aperture lens in an...

2007-10-09

2007-10-09

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492210, C250S492230, C250S505100

Reexamination Certificate

active

11212099

ABSTRACT:
A technique for implementing a variable aperture lens in an ion implanter is disclosed. In one particular exemplary embodiment, the technique may be realized as a variable aperture lens. The variable aperture lens may comprise a first electrode element. The variable aperture lens may also comprise a second electrode element. The variable aperture lens may further comprise a driver assembly coupled to at least one of the first and the second electrode elements, wherein the driver assembly alters an aperture between the first and the second electrode elements based on a geometry of an ion beam.

REFERENCES:
patent: 5780863 (1998-07-01), Benveniste et al.
patent: 2006/0289801 (2006-12-01), Matsuba
patent: 2 265 729 (1993-10-01), None
patent: 2 336 029 (1999-10-01), None
patent: 01 097362 (1999-04-01), None
PCT International Search Report; European Patent Office (ISA); mailed Mar. 2, 2007; 4 pages.
PCT Written Opinion of the International Searching Authority; European Patent Office (ISA); 5 pages.

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