4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Svetlana B. Radovanov

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Monitor system and method for semiconductor processes

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Multi-purpose electrostatic lens for an ion implanter system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Technique for implementing a variable aperture lens in an...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Technique for providing a segmented electrostatic lens in an...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Technique for providing a segmented electrostatic lens in an...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2411371

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