Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-02-26
2010-02-02
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S492200, C250S492220, C382S145000, C382S151000, C438S014000, C348S340000
Reexamination Certificate
active
07655904
ABSTRACT:
A target workpiece inspection apparatus comprises an optical image acquiring unit to acquire an optical image of a target workpiece, a reference image generating unit to generate a reference image to be compared, a difference judging unit to judge whether an absolute value of difference between pixel values of the images in each pixel at a preliminary alignment position between the images is smaller than a threshold value, a least-squares method displacement calculating unit to calculate a displacement amount displaced from the preliminary alignment position, by using a regular matrix for a least-squares method obtained from a result judged, a position correcting unit to correct an alignment position between the optical image and the reference image to a position displaced from the preliminary alignment position by the displacement amount, and a comparing unit to compare the optical image and the reference image whose alignment position has been corrected.
REFERENCES:
patent: 2007/0053582 (2007-03-01), Yamashita
patent: 2007/0230770 (2007-10-01), Kulkarni et al.
patent: 2008/0037860 (2008-02-01), Yamashita
patent: 2008/0260234 (2008-10-01), Yamashita
patent: 63-88682 (1988-04-01), None
patent: 3-278057 (1991-12-01), None
patent: 5-281154 (1993-10-01), None
patent: 6-307826 (1994-11-01), None
patent: 8-64511 (1996-03-01), None
patent: 8-76359 (1996-03-01), None
patent: 8-77357 (1996-03-01), None
patent: 8-304997 (1996-11-01), None
patent: 10-96613 (1998-04-01), None
patent: 10-318950 (1998-12-01), None
patent: 11-132959 (1999-05-01), None
patent: 11-153550 (1999-06-01), None
patent: 2000-348177 (2000-12-01), None
patent: 2001-141677 (2001-05-01), None
patent: 2002-14062 (2002-01-01), None
patent: 2004-317427 (2004-11-01), None
M. Takagi, et al., “Handbook on Image Analysis”, University of Tokyo Press, 1991, 3 pages.
Advanced Mask Inspection Technology Inc.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Wells Nikita
LandOfFree
Target workpiece inspection apparatus, image alignment... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Target workpiece inspection apparatus, image alignment..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Target workpiece inspection apparatus, image alignment... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4184126