Tandem linear scanning confocal imaging system with focal volume

Details Tandem linear scanning confocal imaging system with focal volume Tandem linear scanning confocal imaging system with focal volume

1992-04-21

1993-09-28

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2502013, 2502014, 25022726, 356376, G01N 2186, G01B 1124

Patent

active

052488764

ABSTRACT:
A confocal imaging system utilizes an opaque mask with a slit and a row of pinpoint sensors or utilizes an opaque mask with a skewed pattern of pinholes and an array of isolated pinpoint sensors in a matching pattern in order to obtain sufficient data to provide a complete image for imaging and/or inspecting an object such as electronics in a single one-dimensional scan. The system also simultaneously produces multiple images at different heights in the single one-dimensional scan of the viewed object, and also simultaneously produces images taken in different spectral bands in the same one-dimensional scan of the object to be imaged and/or inspected. The relative height or depth of the different images can be modified by simply adjusting the inclination between the confocal imaging system and a path followed by the object that is to be imaged and/or inspected during the one-dimensional scan. The optical confocal imaging system requires no moving parts and the only moving parts of the system are for motorized conveying of the object to be imaged and/or inspected along the path. In one arrangement of the confocal imaging system, color imaging and/or inspecting of the object can be performed. In another arrangement of the confocal imaging system, simultaneous brightfield and darkfield imaging and/or inspecting of an object can be performed.

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