Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-09-19
2006-09-19
Berman, Jack (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S503100, C250S50400H
Reexamination Certificate
active
07109503
ABSTRACT:
Systems and methods are disclosed for protecting an EUV light source plasma production chamber optical element surface from debris generated by plasma formation. In one aspect of an embodiment of the present invention, a shield is disclosed which comprises at least one hollow tube positioned between the optical element and a plasma formation site. The tube is oriented to capture debris while allowing light to pass through the tube's lumen via reflection at relatively small angles of grazing incidence. In another aspect of an embodiment of the present invention, a shield is disclosed which is heated to a temperature sufficient to remove one or more species of debris material that has deposited on the shield. In yet another aspect of an embodiment of the present invention, a system is disclosed which a shield is moved from a light source plasma chamber to a cleaning chamber where the shield is cleaned.
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Bowering Norbert R.
Bykanov Alexander N.
Ershov Alexander I.
Hansson Bjorn A. M.
Khodykin Oleh
Berman Jack
Cray William C.
Cymer Inc.
Hillman Matthew K.
Yantorno Jennifer
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