Systems and methods for testing germanium devices

Details Systems and methods for testing germanium devices Systems and methods for testing germanium devices

2008-04-15

2008-04-15

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257SE31001

Reexamination Certificate

active

07358527

ABSTRACT:
Systems and methods are disclosed for a test device that is configured to allow assessment of the quality of germanium devices. In one embodiment, the test device is formed on the same substrate as the germanium devices, and includes a plurality of germanium components that are substantially similar to those found in the germanium devices. Such example measurement can used to estimate various quality parameters associated with fabrication of the germanium devices.

REFERENCES:
patent: 5990488 (1999-11-01), Nistler et al.
patent: 6342401 (2002-01-01), Tom
patent: 6396076 (2002-05-01), Tom
patent: 6770907 (2004-08-01), Abadeer et al.
patent: 2003/0094608 (2003-05-01), Abadeer et al.

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