System, method and apparatus for self-cleaning dry etch

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment

Reexamination Certificate

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C216S067000, C216S074000, C216S079000, C134S001100, C134S001200, C134S001300, C134S022140, C438S905000

Reexamination Certificate

active

07140374

ABSTRACT:
A method for cleaning a processing chamber that includes heating an inner surface of the processing chamber to a first temperature. The first temperature can be sufficient to cause a first species to become volatile. The first species can be one of several species deposited on the inner surface. A cleaning chemistry is injected into the processing chamber. The cleaning chemistry can be reactive with a second one of the species to convert the second species to the first species. The volatilized first species can also be output from the processing chamber. A system for cleaning the process chamber is also described.

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