System for removal of material from the surface of a sample

Details System for removal of material from the surface of a sample System for removal of material from the surface of a sample

1980-04-10

1982-01-12

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250281, G01N 2300

Patent

active

043107591

ABSTRACT:
A system and method for removing material from the surface of a sample comprising: a high-frequency plasma produced in front of the sample surface; a metallic shield electrically insulated from the sample and provided with an opening determining the area to be removed, disposed between the sample and the high-frequency plasma. The parameters of this arrangement are chosen so that the relation

REFERENCES:
patent: 3845305 (1974-10-01), Liebl
patent: 3963923 (1976-06-01), Coles

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