System for correcting eccentricity and rotational error of a wor

Details System for correcting eccentricity and rotational error of a wor System for correcting eccentricity and rotational error of a wor

1997-09-10

2000-09-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25049221, G21K 510, H01J 3930

Patent

active

061147052

ABSTRACT:
A system for correcting eccentricity and rotational error of a substantially circular workpiece, in which the workpiece is moved to a workstation, using a translating device. The rotational position and position of the workpiece center is determined. There is a rotatable member at the workstation, having a home position and a center. The rotatable member is pre-rotated from its home position an amount sufficient to correct workpiece rotational error. The translating device is caused to place the workpiece on the rotatable member such that the workpiece center is at a known position relative to the center of the rotatable member, to correct eccentricity. The rotatable member is then rotated back to its home position, to correct rotational error.

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