System and method for manufacturing semiconductor devices...

Details System and method for manufacturing semiconductor devices... System and method for manufacturing semiconductor devices...

2007-10-09

2007-10-09

Jackson, Jerome (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S437000, C438S048000, C438S072000, C438S636000, C438S322000

Reexamination Certificate

active

11007031

ABSTRACT:
An anti-reflective coating layer for the manufacturing of semiconductor devices is disclosed. In one example, a partial semiconductor device includes a substrate; a bottom anti-reflective coating (BARC) layer over the substrate, and the BARC layer is transformed from being hydrophobic to being hydrophilic during a lithography process; and a photoresist layer over the BARC layer.

REFERENCES:
patent: 5294680 (1994-03-01), Knors et al.
patent: 6165684 (2000-12-01), Mizutani et al.
patent: 2004/0191479 (2004-09-01), Hatakeyama et al.
patent: 2006/0057507 (2006-03-01), Chang et al.

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