System and method for integrated data transfer, archiving...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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Details

C716S030000, C716S030000, C700S121000, C709S201000, C709S202000, C709S203000

Reexamination Certificate

active

11177702

ABSTRACT:
A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including a data acquisition system for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, a buffer system for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance, a server system for providing storage for the scan data transmitted from the buffer system and converting the scan data into a format used by and stored in a database management system; and an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system managing the purging, archiving, restoring, importing and exporting of scan data.

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patent: 6701259 (2004-03-01), Dor et al.
patent: 6980873 (2005-12-01), Shen
patent: 6990385 (2006-01-01), Smith et al.
patent: 7123980 (2006-10-01), Funk et al.
patent: 7218985 (2007-05-01), Naya et al.
patent: 2002/0161532 (2002-10-01), Dor et al.
patent: 2002/0165636 (2002-11-01), Hasan

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