Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2007-03-27
2007-03-27
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C702S083000, C700S121000, C438S014000
Reexamination Certificate
active
11090217
ABSTRACT:
A system for identifying a manufacturing tool causing a failure, includes a data generating module generating factorial effect data, based on information on a failure lot group by using an orthogonal array, a chart generating module generating a factorial effect chart based on the factorial effect data, a selection module selecting failure lots caused by the same reason for a failure from among the failure lot group, based on the factorial effect chart, and an identification module identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.
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Kadota Kenichi
Matsushita Hiroshi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Hoff Marc S.
Kabushiki Kaisha Toshiba
Suglo Janet L
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