System and method for identifying a manufacturing tool...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation

Reexamination Certificate

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C702S083000, C700S121000, C438S014000

Reexamination Certificate

active

11090217

ABSTRACT:
A system for identifying a manufacturing tool causing a failure, includes a data generating module generating factorial effect data, based on information on a failure lot group by using an orthogonal array, a chart generating module generating a factorial effect chart based on the factorial effect data, a selection module selecting failure lots caused by the same reason for a failure from among the failure lot group, based on the factorial effect chart, and an identification module identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

REFERENCES:
patent: 5621665 (1997-04-01), Ghosh et al.
patent: 2002/0193891 (2002-12-01), Ushiku
patent: 2003/0011376 (2003-01-01), Matsushita et al.
patent: 2003/0028279 (2003-02-01), Wang et al.
patent: 2004/0049722 (2004-03-01), Matsushita
patent: 2004/0255198 (2004-12-01), Matsushita et al.
patent: 2005/0021303 (2005-01-01), Matsushita et al.
Matsushita et al.; “Highly Sensitive Inspection System for Lithography-Related Faults in Agile-Fab—Detecting Algorithm for Monitoring and Evaluation of Yield Impact”; IEEE Transactions on Semiconductor Manufacturing, vol. 15, No. 4, pp. 506-512, (2002).
Matsushita et al.; “Failure Detection System, Failure Detection Method, and Computer Program Product”; U.S. Appl. No. 10/784,819, filed Feb. 24, 2004.

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