Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2009-06-08
2010-11-23
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S239300, C356S600000, C356S601000, C250S559400, C250S559490, C359S305000, C359S215100
Reexamination Certificate
active
07839495
ABSTRACT:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
REFERENCES:
patent: 5864394 (1999-01-01), Jordan et al.
patent: 6809809 (2004-10-01), Kinney et al.
Baran Bruce
Bills Richard E.
Gao Songping
Koliopoulos Chris L.
Murphree Michael
Alli Iyabo S
KLA-Tencor Corporation
Leudeka, Neely & Graham, P.C.
Toatley Gregory J
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