Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1994-11-14
1996-04-02
Pham, Hoa Q
Optics: measuring and testing
By polarized light examination
Of surface reflection
250225, G01N 2121
Patent
active
055045820
ABSTRACT:
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a stationary compensator, positioned between an analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The use of a light fiber to carry light from a source thereof, to a polarization state generator, is also disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.
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Christenson Reed A.
Doerr David W.
Green Steven E.
Johs Blaine D.
Pittal Shakil A.
J. A. Woollam Co. Inc.
Pham Hoa Q
Welch James D.
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