System and method for cleaning an ion implanter

Details System and method for cleaning an ion implanter System and method for cleaning an ion implanter

2006-12-14

2009-06-09

Souw, Bernard E (Department: 2881)

Cleaning and liquid contact with solids

Processes

Including use of vacuum, suction, or inert atmosphere

C134S008000, C134S022100, C134S026000, C134S037000, C015S320000, C015S322000

Reexamination Certificate

active

07544254

ABSTRACT:
This disclosure provides an approach for cleaning an ion implanter. In this disclosure, there is a vacuum device having an in-take port adapted to receive a contaminant removing hose. The vacuum device and hose are configured to provide constant suction to the ion implanter. A dry ice blaster having a dry ice dispensing hose is configured to supply dry ice. A sealing plate is adapted to attach to an access section of a processing region of the ion implanter. The sealing plate has a first opening configured to receive the contaminant removing hose and the dry ice dispensing hose.

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