4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Paul S. Buccos

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Ion implanter system, method and program product including...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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System and method for cleaning an ion implanter

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2875544

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