Susceptor shaft vacuum pumping

Details Susceptor shaft vacuum pumping Susceptor shaft vacuum pumping

2005-05-24

2005-05-24

Meeks, Timothy (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

C427S294000, C118S728000

Reexamination Certificate

active

06896929

ABSTRACT:
Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.

REFERENCES:
patent: 4737824 (1988-04-01), Sakai et al.
patent: WO 0107691 (2001-02-01), None

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