Susceptor of apparatus for manufacturing semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support

Reexamination Certificate

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Details

C156S345510, C118S725000, C118S728000, C204S298150

Reexamination Certificate

active

06884319

ABSTRACT:
A susceptor of an apparatus for manufacturing a semiconductor device includes a first part having a first lift pin hole, a second part combined with the first part and forming a space with the first part, wherein the second part has a second lift pin hole corresponding to the first lift pin hole, a heater disposed in the space, wherein the heater has a third lift pin hole corresponding to the first and second lift pin holes, a lift pin tube inserted in the first, second and third lift pin holes, wherein the lift pin tube is combined with the first and second part thereby preventing air from going into the space, and a lift pin passing through the lift pin tube.

REFERENCES:
patent: 5352294 (1994-10-01), White et al.
patent: 5421893 (1995-06-01), Perlov
patent: 5462603 (1995-10-01), Murakami
patent: 5558717 (1996-09-01), Zhao et al.
patent: 5562947 (1996-10-01), White et al.
patent: 6120609 (2000-09-01), Selyutin et al.
patent: 6148762 (2000-11-01), Fukuda et al.
patent: 6435798 (2002-08-01), Satoh

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