Coating apparatus – Gas or vapor deposition – With treating means
Patent
1992-11-12
1994-07-26
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
392413, 392415, 118728, C23C 1600
Patent
active
053324420
ABSTRACT:
The present invention relates to a surface processing apparatus which performs heating processing of an object of heating which is mounted on a mounting device provided inside a process container, and which includes a plural number of lamps provided so as to oppose a rear surface of a processing surface of an object of processing, a rotating unit which has the plural number of lamps mounted to it in a ring shape, and a drive unit which drives the rotating unit. Also, the present invention relates to a processing apparatus for leading a process gas from a gas supply tube to a gas chamber partitioned inside a process container, and which blows process gas from an outlet of the gas chamber and onto an object of processing which is mounted on a mounting device provided inside the process container, and which includes a plural number of partition plates each provided with a plural number of through holes, being provided at required intervals in a direction of gas flow and inside the gas chamber.
REFERENCES:
patent: 2912558 (1959-11-01), Root
patent: 2963567 (1960-12-01), Roth
patent: 3062987 (1962-11-01), Cuffman
patent: 3623712 (1971-11-01), McNeilly
patent: 4615294 (1986-10-01), Scapple
patent: 4817558 (1989-04-01), Itoh
patent: 4836138 (1989-06-01), Robinson
Kubodera Masao
Kumagai Hiromi
Narushima Masaki
Ozawa Masahito
Tanaka Sumi
Bueker Richard
Tokyo Electron Kabushiki Kaisha
LandOfFree
Surface processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface processing apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1050764