Surface processing apparatus

Details Surface processing apparatus Surface processing apparatus

1992-11-12

1994-07-26

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

392413, 392415, 118728, C23C 1600

Patent

active

053324420

ABSTRACT:
The present invention relates to a surface processing apparatus which performs heating processing of an object of heating which is mounted on a mounting device provided inside a process container, and which includes a plural number of lamps provided so as to oppose a rear surface of a processing surface of an object of processing, a rotating unit which has the plural number of lamps mounted to it in a ring shape, and a drive unit which drives the rotating unit. Also, the present invention relates to a processing apparatus for leading a process gas from a gas supply tube to a gas chamber partitioned inside a process container, and which blows process gas from an outlet of the gas chamber and onto an object of processing which is mounted on a mounting device provided inside the process container, and which includes a plural number of partition plates each provided with a plural number of through holes, being provided at required intervals in a direction of gas flow and inside the gas chamber.

REFERENCES:
patent: 2912558 (1959-11-01), Root
patent: 2963567 (1960-12-01), Roth
patent: 3062987 (1962-11-01), Cuffman
patent: 3623712 (1971-11-01), McNeilly
patent: 4615294 (1986-10-01), Scapple
patent: 4817558 (1989-04-01), Itoh
patent: 4836138 (1989-06-01), Robinson

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