Surface observing apparatus and method

Details Surface observing apparatus and method Surface observing apparatus and method

1993-01-06

1995-07-25

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 324260, H01J 3700

Patent

active

054364485

ABSTRACT:
A surface observing apparatus for obtaining information of a specimen comprises a probe disposed in the close vicinity of the specimen, a deformable cantilever for holding the probe, a scanning mechanism for scanning a surface of the specimen with the probe and a detector for detecting displacements of the cantilever to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever. The apparatus further comprises a first detector for detecting a force acting on the probe from the displacement of the cantilever, and a second detector for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.

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