Surface inspection system and method of inspecting surface of wo

Details Surface inspection system and method of inspecting surface of wo Surface inspection system and method of inspecting surface of wo

1995-03-06

1998-01-27

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356343, G01N 2188

Patent

active

057127018

ABSTRACT:
A surface inspection system and methods of inspecting a surface of a workpiece are provided for detecting particles, defects, or other surface characteristics in or on a surface of the workpiece. The surface inspection system preferably has a transporter arranged for transporting a workpiece along a material path and a rotator associated with the transporter and arranged for rotating a workpiece during translational travel along the material path. A scanner is positioned and arranged for scanning a surface of a workpiece during rotational and translational travel along the material path. The scanner preferably includes a light source arranged to generate a light beam therefrom and a deflector positioned to receive the light beam and arranged for deflecting the light beam along a predetermined scan path across a surface of the workpiece as the workpiece rotationally and translationally travels along the material path. A collector also is preferably arranged for collecting light specularly reflected and scattered from the surface of the workpiece during rotational and translational travel along the material path.

REFERENCES:
patent: 4314763 (1982-02-01), Steigmeier et al.
patent: 4441124 (1984-04-01), Heebner et al.
patent: 4505585 (1985-03-01), Yoshikawa et al.
patent: 4508450 (1985-04-01), Ohshima et al.
patent: 4541712 (1985-09-01), Whitney
patent: 4630276 (1986-12-01), Moran
patent: 4740708 (1988-04-01), Batchelder
patent: 4875780 (1989-10-01), Moran et al.
patent: 4889998 (1989-12-01), Hagano et al.
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 4902131 (1990-02-01), Yamazaki et al.
patent: 4966457 (1990-10-01), Hayano et al.
patent: 5067798 (1991-11-01), Tomoyasu
patent: 5108176 (1992-04-01), Malin et al.
patent: 5125741 (1992-06-01), Okada et al.
patent: 5127726 (1992-07-01), Moran
patent: 5135303 (1992-08-01), Uto et al.
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5189481 (1993-02-01), Jann et al.
patent: 5191466 (1993-03-01), Gross et al.
patent: 5461474 (1995-10-01), Yoshii et al.
Silicon Detector Corporation catalog (four pages) on Bi-Cell and Quadrant Silicon Detectors (1987).
Advanced Photonix, Inc. catalog, pp. 32-35, on Position Sensing Photodetectors, no date.

Affiliated with

Also associated with

Rating

Surface inspection system and method of inspecting surface of wo does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface inspection system and method of inspecting surface of wo, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface inspection system and method of inspecting surface of wo will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-346258